| MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm M Heertjes, D Hennekens, M Steinbuch Control Engineering Practice 18 (5), 495-506, 2010 | 130 | 2010 |
| Constrained iterative feedback tuning for robust control of a wafer stage system MF Heertjes, B Van der Velden, T Oomen IEEE transactions on control systems technology 24 (1), 56-66, 2015 | 108 | 2015 |
| Nonlinear iterative learning control with applications to lithographic machinery M Heertjes, T Tso Control Engineering Practice 15 (12), 1545-1555, 2007 | 81 | 2007 |
| Industry engagement with control research: Perspective and messages T Samad, M Bauer, S Bortoff, S Di Cairano, L Fagiano, PF Odgaard, ... Annual Reviews in Control 49, 1-14, 2020 | 71 | 2020 |
| Frequency-domain tools for stability analysis of reset control systems S Van Loon, KGJ Gruntjens, MF Heertjes, N van de Wouw, W Heemels Automatica 82, 101-108, 2017 | 70 | 2017 |
| Performance-improved design of N-PID controlled motion systems with applications to wafer stages MF Heertjes, XGP Schuurbiers, H Nijmeijer IEEE Transactions on Industrial Electronics 56 (5), 1347-1355, 2009 | 67 | 2009 |
| Performance of convergence-based variable-gain control of optical storage drives N van de Wouw, HA Pastink, MF Heertjes, AV Pavlov, H Nijmeijer Automatica 44 (1), 15-27, 2008 | 62 | 2008 |
| Nonlinear dynamics and control of a pneumatic vibration isolator M Heertjes, N van de Wouw | 61 | 2006 |
| Stability and performance of a variable gain controller with application to a dvd storage drive M Heertjes, M Steinbuch Automatica 40 (4), 591-602, 2004 | 55 | 2004 |
| Hybrid integrator design for enhanced tracking in motion control DA Deenen, MF Heertjes, W Heemels, H Nijmeijer 2017 American Control Conference (ACC), 2863-2868, 2017 | 52 | 2017 |
| Control of wafer scanners: Methods and developments MF Heertjes, H Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, ... 2020 American Control Conference (ACC), 3686-3703, 2020 | 51 | 2020 |
| Active vibration isolation of metrology frames; a modal decoupled control design M Heertjes, K de Graaff, JG van der Toorn | 48 | 2005 |
| Synthesis of variable gain integral controllers for linear motion systems B Hunnekens, N van de Wouw, M Heertjes, H Nijmeijer IEEE Transactions on Control Systems Technology 23 (1), 139-149, 2014 | 47 | 2014 |
| Second-order reset elements for stage control design L Hazeleger, M Heertjes, H Nijmeijer 2016 American Control Conference (ACC), 2643-2648, 2016 | 45 | 2016 |
| Set-point variation in learning schemes with applications to wafer scanners MF Heertjes, RMJG van de Molengraft Control Engineering Practice 17 (3), 345-356, 2009 | 44 | 2009 |
| Experimental and numerical analysis of the steady state behaviour of a beam system with impact ELB Van De Vorst, MF Heertjes, DH Van Campen, A De Kraker, RHB Fey Journal of Sound and Vibration 212 (2), 321-336, 1998 | 44 | 1998 |
| Hybrid integrator-gain systems: A remedy for overshoot limitations in linear control? S Van den Eijnden, MF Heertjes, W Heemels, H Nijmeijer IEEE Control Systems Letters 4 (4), 1042-1047, 2020 | 42 | 2020 |
| Data-based feed-forward control in MIMO motion systems M Baggen, M Heertjes, R Kamidi 2008 American Control Conference, 3011-3016, 2008 | 41 | 2008 |
| Projection-based integrators for improved motion control: Formalization, well-posedness and stability of hybrid integrator-gain systems DA Deenen, B Sharif, S van den Eijnden, H Nijmeijer, M Heemels, ... Automatica 133, 109830, 2021 | 40 | 2021 |
| Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators MA Beijen, MF Heertjes, J Van Dijk, WBJ Hakvoort Control engineering practice 72, 90-103, 2018 | 39 | 2018 |
